プラズマCVD（PECVD）
OTF-1200X-II-PEC4SL-LD Sliding Multi-Zone PECVD Workstation
モデルOTF-1200X-II-PEC4SL-LD
An integrated PECVD workstation combines sliding heating zones, four-channel mass-flow gas control and vacuum pumping. Tube diameter and zone count depend on the selected configuration.
Continuous temperature
1100 °C
Tube and zone options
50/80 mm OD: 2 zones; 130 mm OD: 3 zones
RF plasma source
5–300 W; 13.56 MHz
- 最終構成は見積前に確認
- 用途に応じてカスタムと付属品を確認
- 輸出梱包と書類は必要に応じて対応
技術データ
技術仕様
仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。
Key specifications
| Continuous temperature | 1100 °C |
|---|---|
| Tube and zone options | 50/80 mm OD: 2 zones; 130 mm OD: 3 zones |
| RF plasma source | 5–300 W; 13.56 MHz |
| Gas flow control | 4 MFC channels; ±1.5% FS |
| System vacuum | Approximately 10^-2 Torr |
仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。
製品説明
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
発注前に調達条件を確認できます。
要件を確認
海外購入者向けに、構成、付属品、梱包方法、輸出書類、検査写真または動画、出荷条件を見積確認に含められます。
関連設備
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