プラズマCVD（PECVD）
OTF-1200X-II-50-PEMSL Auto-Sliding PECVD Furnace with Preheater
モデルOTF-1200X-II-50-PEMSL
A dual-zone plasma CVD platform with a separate precursor preheater and programmable furnace travel, suitable for vapor delivery and rapid sample exposure studies.
Continuous temperature
1100 °C
Heating zones
2 x 200 mm; 250 mm uniform zone at equal settings
RF plasma source
5–300 W; 13.56 MHz
- 最終構成は見積前に確認
- 用途に応じてカスタムと付属品を確認
- 輸出梱包と書類は必要に応じて対応
技術データ
技術仕様
仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。
Key specifications
| Continuous temperature | 1100 °C |
|---|---|
| Heating zones | 2 x 200 mm; 250 mm uniform zone at equal settings |
| RF plasma source | 5–300 W; 13.56 MHz |
| Quartz tube | 50 mm OD x 44 mm ID x 2200 mm L |
| Sliding speed | 0–70 mm/s |
仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。
製品説明
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
発注前に調達条件を確認できます。
要件を確認
海外購入者向けに、構成、付属品、梱包方法、輸出書類、検査写真または動画、出荷条件を見積確認に含められます。
関連設備
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