OTF-1200X-II-PEC4SL-LD Sliding Multi-Zone PECVD Workstation
An integrated PECVD workstation combines sliding heating zones, four-channel mass-flow gas control and vacuum pumping. Tube diameter and zone count depend on the selected configuration.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Continuous temperature | 1100 °C |
|---|---|
| Tube and zone options | 50/80 mm OD: 2 zones; 130 mm OD: 3 zones |
| RF plasma source | 5–300 W; 13.56 MHz |
| Gas flow control | 4 MFC channels; ±1.5% FS |
| System vacuum | Approximately 10^-2 Torr |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Product description
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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