プラズマCVD（PECVD）
OTF-1200X-II-PE-RR Roll-to-Roll Plasma CVD Furnace
モデルOTF-1200X-II-PE-RR
A continuous-substrate PECVD platform guides foil or wire between sealed chambers while controlling plasma power, transport speed and tension for film-growth research.
Operating temperature
1100 °C continuous; 1200 °C for <60 min
Quartz tube
80 mm OD x 72 mm ID x 1400 mm L
RF plasma source
5–300 W; 13.56 MHz
- 最終構成は見積前に確認
- 用途に応じてカスタムと付属品を確認
- 輸出梱包と書類は必要に応じて対応
技術データ
技術仕様
仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。
Key specifications
| Operating temperature | 1100 °C continuous; 1200 °C for <60 min |
|---|---|
| Quartz tube | 80 mm OD x 72 mm ID x 1400 mm L |
| RF plasma source | 5–300 W; 13.56 MHz |
| Transport speed and width | 1–400 mm/min; up to 65 mm width with 80 mm tube |
| Tension control | 0–1000 g |
仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。
製品説明
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
発注前に調達条件を確認できます。
要件を確認
海外購入者向けに、構成、付属品、梱包方法、輸出書類、検査写真または動画、出荷条件を見積確認に含められます。
関連設備
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