VTC-600-3HD-GB Glovebox-Integrated Three-Source Sputtering System
Three 2-inch sputtering sources combine with a purified glovebox for handling and coating air-sensitive materials.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Glovebox chamber: 1200 × 740 × 900 mm
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Purified atmosphere: O2 <1 ppm; H2O <1 ppm
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Sputtering heads: 3 × 2 in
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Glovebox chamber | 1200 × 740 × 900 mm |
|---|---|
| Purified atmosphere | O2 <1 ppm; H2O <1 ppm |
| Sputtering heads | 3 × 2 in |
| Source configuration | 2 × 500 W DC + 1 × 300 W RF (13.56 MHz) |
| Deposition chamber | Ø300 × 300 mm |
| Sample stage | Ø140 mm; 1–20 rpm; up to 500 °C |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
The illustration shows the three-head sputtering module, not the complete glovebox. DC/RF supplies and glovebox integration require configuration confirmation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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