VTC-16-3HD-LD Three-Target Rotary Plasma Sputtering Coater
Three coating positions and touchscreen control support successive metallic coatings without manually repositioning the sample.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Target size: Ø47 mm; thickness ≤2.5 mm
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Output: 1600 V DC; 40 mA max.
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Chamber inner size: Ø150 × 150 mm
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Target size | Ø47 mm; thickness ≤2.5 mm |
|---|---|
| Output | 1600 V DC; 40 mA max. |
| Chamber inner size | Ø150 × 150 mm |
| Sample stage | Ø50 mm; 3 coating positions |
| Target distance | 25–40 mm |
| Optional stage heater | Up to 500 °C |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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