VTC-3RF Three-Head RF Magnetron Coater with Heated Rotating Stage
Three 1-inch sources allow sequential coating under vacuum, while the heated rotating stage supports thin-film process development.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Sputtering heads: 3 × 1 in
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Standard RF supply: 100 W; 13.5 MHz; manual matching
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Target distance: 50–80 mm
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Sputtering heads | 3 × 1 in |
|---|---|
| Standard RF supply | 100 W; 13.5 MHz; manual matching |
| Target distance | 50–80 mm |
| Stage diameter | 50 mm |
| Stage rotation | 1–10 rpm |
| Stage heating limits | 600 °C for ≤5 min; 500 °C for ≤2 h |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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