SYJ-1610 Air-Bearing Dicing Saw for 6-Inch Wafers
The SYJ-1610 is an air-bearing spindle platform for thin-wafer dicing. A 3000-50000 rpm speed range, camera-assisted alignment and programmable control support laboratory wafer processing with dedicated cooling-water and clean-air services.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
- Thin-wafer dicing
- Research wafer process development
Key product features
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Air-bearing high-speed spindle
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Camera-assisted alignment with ring and coaxial lighting
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Programmable touchscreen operation
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Wafer and table size | Up to 6-inch wafers; 160 x 160 mm square table |
|---|---|
| Spindle speed | 3000-50000 rpm |
| Blade size | 50.8-60 mm OD; 40 mm ID; 0.035-0.35 mm thickness |
| Maximum cutting depth | 1.5 mm |
| Axis precision | Y single-step accuracy: 0.003 mm/5 mm; Z repeatability: 0.001 mm |
| Electrical supply and power | 220 V AC +/-10%, single-phase; 3 kW |
| Compressed-air requirement | At least 0.6 MPa and 300 L/min; clean, dry, oil-free |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Plan utilities before installation: cutting water is listed at at least 0.3 MPa and 3 L/min; the air source must be clean, dry and oil-free. Confirm current controller software and the exact blade/flange configuration in the quotation.
Images may show optional accessories. Confirm blade, fixtures, electrical configuration and delivered items with LabSova before ordering.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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