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Chemical Vapor Deposition (CVD)

OTF-1200X-Mist Four-Gas Mist CVD Growth Furnace

ModelOTF-1200X-Mist

A mist-assisted film-growth furnace with a 400 mm heating zone, ultrasonic atomization and four-channel mass-flow delivery for precursor and carrier-gas studies.

Maximum temperature 1200 °C
Heating zone 400 mm; 125 mm uniform zone
Quartz tube 60 mm OD x 54 mm ID x 1000 mm L
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Maximum temperature 1200 °C
Heating zone 400 mm; 125 mm uniform zone
Quartz tube 60 mm OD x 54 mm ID x 1000 mm L
Atomization and feed 1.7 MHz; 0.004–70 mL/min
Gas control 4 MFC channels, 0–500 mL/min; ±0.2% FS

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.