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Plasma-Enhanced CVD (PECVD)

OTF-1200X-II-PE-RR Roll-to-Roll Plasma CVD Furnace

ModelOTF-1200X-II-PE-RR

A continuous-substrate PECVD platform guides foil or wire between sealed chambers while controlling plasma power, transport speed and tension for film-growth research.

Operating temperature 1100 °C continuous; 1200 °C for <60 min
Quartz tube 80 mm OD x 72 mm ID x 1400 mm L
RF plasma source 5–300 W; 13.56 MHz
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Operating temperature 1100 °C continuous; 1200 °C for <60 min
Quartz tube 80 mm OD x 72 mm ID x 1400 mm L
RF plasma source 5–300 W; 13.56 MHz
Transport speed and width 1–400 mm/min; up to 65 mm width with 80 mm tube
Tension control 0–1000 g

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.