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Plasma-Enhanced CVD (PECVD)

OTF-1200X-III-R5-PECVD Continuous-Feed Rotary Powder PECVD Furnace

ModelOTF-1200X-III-R5-PECVD

A rotary plasma CVD furnace with automatic powder dosing and sealed collection for surface coating and core-shell particle research. Rotation and tilt control powder movement through the hot zone.

Operating temperature Working ≤1100 °C; maximum 1200 °C
Heating zones 150 + 300 + 150 mm
Rotation and tilt 2–10 rpm; 0–15°
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Operating temperature Working ≤1100 °C; maximum 1200 °C
Heating zones 150 + 300 + 150 mm
Rotation and tilt 2–10 rpm; 0–15°
Powder capacity 5 L tumbling volume; recommended loading 1–1.25 L
RF plasma source 5–300 W; 13.56 MHz
Powder feed rate 0–97 mL/min, estimated

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.