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Plasma-Enhanced CVD (PECVD)

OTF-1200X-II-50-PEMSL Auto-Sliding PECVD Furnace with Preheater

ModelOTF-1200X-II-50-PEMSL

A dual-zone plasma CVD platform with a separate precursor preheater and programmable furnace travel, suitable for vapor delivery and rapid sample exposure studies.

Continuous temperature 1100 °C
Heating zones 2 x 200 mm; 250 mm uniform zone at equal settings
RF plasma source 5–300 W; 13.56 MHz
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Continuous temperature 1100 °C
Heating zones 2 x 200 mm; 250 mm uniform zone at equal settings
RF plasma source 5–300 W; 13.56 MHz
Quartz tube 50 mm OD x 44 mm ID x 2200 mm L
Sliding speed 0–70 mm/s

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.