OTF-1200X-II-PEC4 Rotary Plasma-Enhanced Hybrid CVD Furnace
A rotary two-zone furnace combines RF plasma, solid-source evaporation and four-gas delivery for powder surface-coating research. Tube, drive and flange configurations are confirmed per order.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Operating temperature | 1100 °C continuous; 1200 °C for <1 h |
|---|---|
| Heating zones | 2 x 200 mm; 400 mm total |
| RF plasma source | 5–300 W; 13.56 MHz |
| Gas control | 4 MFC channels: 0–100, 0–200, 0–200, 0–500 sccm |
| Evaporation source | 0.7 mL alumina crucible; 500 W DC supply |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Product description
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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