OTF-1200X-4-III-9HV Nine-Gas High-Vacuum CVD Furnace
A three-zone quartz-tube workstation for multi-gas deposition studies, integrating nine mass-flow channels with programmable heating and high-vacuum pumping.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Operating temperature | 1100 °C continuous; 1200 °C maximum |
|---|---|
| Heating zones | 220 + 440 + 220 mm |
| Quartz tube | 100 mm OD x 92 mm ID x 1400 mm L |
| Gas control | 9 MFC channels; ±1.5% FS; ranges configured by channel |
| Furnace power | 208–240 V AC, single phase; 7 kW max |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Product description
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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