RF-600-LD 600 W RF Power Supply for Plasma Process Systems
An RF supply for a 50-ohm load, available in specified frequency versions for integration into plasma process equipment.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Maximum forward power: 600 W into 50 Ω
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Frequency versions: 400 kHz; 2, 13.56, 27.12, 40.68 or 60 MHz
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Frequency stability: ±0.005%
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Maximum forward power | 600 W into 50 Ω |
|---|---|
| Frequency versions | 400 kHz; 2, 13.56, 27.12, 40.68 or 60 MHz |
| Frequency stability | ±0.005% |
| Rise time | <200 ms |
| AC input | 208 V; single phase |
| Dimensions | 216 × 134 × 469 mm |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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