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Thin Film Deposition Equipment

VTC-STX-XX Compact 2-Inch Magnetron Coater with DC or RF Options

ModelVTC-STX-XX

A compact quartz-chamber coating platform with a rotating specimen stage; select the DC or RF supply to suit the target material.

Power-source options 500 W DC or 300 W RF
Sputtering head 2 in; water cooled
Chamber inner size Ø150 × 250 mm
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Equipment features

Key product features

  • Power-source options: 500 W DC or 300 W RF

  • Sputtering head: 2 in; water cooled

  • Chamber inner size: Ø150 × 250 mm

Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Power-source options 500 W DC or 300 W RF
Sputtering head 2 in; water cooled
Chamber inner size Ø150 × 250 mm
Sample stage diameter 50 mm
Stage rotation 1–10 rpm
Optional stage heater Up to 500 °C

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.