化学気相成長（CVD）
OTF-1200X-III-5-C3LVSF Sliding-Flange Three-Zone CVD Furnace
モデルOTF-1200X-III-5-C3LVSF
A 130 mm quartz-tube CVD system with three independent heating zones, gas mixing and a guided flange that simplifies sample loading.
Operating temperature
1100 °C continuous; 1200 °C maximum
Quartz tube
130 mm OD x 120 mm ID x 1400 mm L
Uniform-temperature length
625 mm at equal zone settings; ±1 °C
- 最終構成は見積前に確認
- 用途に応じてカスタムと付属品を確認
- 輸出梱包と書類は必要に応じて対応
技術データ
技術仕様
仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。
Key specifications
| Operating temperature | 1100 °C continuous; 1200 °C maximum |
|---|---|
| Quartz tube | 130 mm OD x 120 mm ID x 1400 mm L |
| Uniform-temperature length | 625 mm at equal zone settings; ±1 °C |
| Loading rail | 800 mm |
| Gas mixing | 3 channels |
仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。
製品説明
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
発注前に調達条件を確認できます。
要件を確認
海外購入者向けに、構成、付属品、梱包方法、輸出書類、検査写真または動画、出荷条件を見積確認に含められます。
関連設備
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