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化学気相成長(CVD)

GSL-1100X-8.5-III-SR Large-Bore Three-Zone CVD Furnace

モデルGSL-1100X-8.5-III-SR

A wide quartz-tube furnace with three temperature zones and a sliding flange support for loading larger substrates in atmosphere-controlled thermal and deposition experiments.

Operating temperature 400–1000 °C continuous; 1100 °C maximum
Quartz tube 8.5 in OD x 8.2 in ID x 51 in L
Heating zones 3 x 300 mm; 500 mm uniform zone at equal settings
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  • 用途に応じてカスタムと付属品を確認
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技術データ

技術仕様

仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。

Key specifications

Operating temperature 400–1000 °C continuous; 1100 °C maximum
Quartz tube 8.5 in OD x 8.2 in ID x 51 in L
Heating zones 3 x 300 mm; 500 mm uniform zone at equal settings
Temperature program 3 controllers; 30 segments each; ±1 °C
Power supply 220 V AC, single phase; 8 kW

仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。

製品説明

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.