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Chemical Vapor Deposition (CVD)

GSL-1100X-8.5-III-SR Large-Bore Three-Zone CVD Furnace

ModelGSL-1100X-8.5-III-SR

A wide quartz-tube furnace with three temperature zones and a sliding flange support for loading larger substrates in atmosphere-controlled thermal and deposition experiments.

Operating temperature 400–1000 °C continuous; 1100 °C maximum
Quartz tube 8.5 in OD x 8.2 in ID x 51 in L
Heating zones 3 x 300 mm; 500 mm uniform zone at equal settings
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Operating temperature 400–1000 °C continuous; 1100 °C maximum
Quartz tube 8.5 in OD x 8.2 in ID x 51 in L
Heating zones 3 x 300 mm; 500 mm uniform zone at equal settings
Temperature program 3 controllers; 30 segments each; ±1 °C
Power supply 220 V AC, single phase; 8 kW

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.