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薄膜成膜装置

GSL-1700X-EV4 Four-Crucible Thermal Evaporator for Sequential Thin Films

モデルGSL-1700X-EV4

Four evaporation crucibles are heated sequentially for multilayer films, using a shared temperature controller and rotating 2-inch stage.

Evaporation crucibles 4 × 3 mL; sequential heating
Standard temperature range 200–1500 °C with S-type thermocouples
High-temperature option B-type thermocouple for 1200–1700 °C
  • 最終構成は見積前に確認
  • 用途に応じてカスタムと付属品を確認
  • 輸出梱包と書類は必要に応じて対応
設備の特徴

主な製品特徴

  • Evaporation crucibles: 4 × 3 mL; sequential heating

  • Standard temperature range: 200–1500 °C with S-type thermocouples

  • High-temperature option: B-type thermocouple for 1200–1700 °C

技術データ

技術仕様

仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。

Key specifications

Evaporation crucibles 4 × 3 mL; sequential heating
Standard temperature range 200–1500 °C with S-type thermocouples
High-temperature option B-type thermocouple for 1200–1700 °C
Sample stage 2 in diameter; 5 rpm
Chamber inner size Ø260 × 310 mm
Temperature program 30 segments; ±1 °C

仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。

Confirm the evaporation material, source compatibility, substrate dimensions, vacuum level and electrical configuration with LabSova. Equipment and accessories are supplied according to the agreed configuration.