VTC-600-2HD-GB-LD Glovebox RF/DC Dual-Head Magnetron Coating System
A recessed dual-head coater keeps sample handling inside a purified glovebox, with DC and RF supplies mounted outside.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
-
Glovebox chamber: 1200 × 740 × 900 mm
-
Purified atmosphere: O2 <1 ppm; H2O <1 ppm
-
Sputtering heads: 2 × 2 in
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Glovebox chamber | 1200 × 740 × 900 mm |
|---|---|
| Purified atmosphere | O2 <1 ppm; H2O <1 ppm |
| Sputtering heads | 2 × 2 in |
| Source ratings | 500 W DC; 300 W RF, 13.56 MHz |
| Deposition chamber | Ø300 × 300 mm |
| Stage rotation | 1–20 rpm |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
More from this category
VTC-16-D Compact DC Sputter Coater for SEM Sample Preparation
View details →
GSL-1100X-SPC-16C-LD Combined Sputter and Carbon Evaporation Coater
View details →
VTC-16-3HD-LD Three-Target Rotary Plasma Sputtering Coater
View details →
VTC-16-SM 250 W DC Magnetron Coater with Rotating Stage
View details →
VTC-STX-XX Compact 2-Inch Magnetron Coater with DC or RF Options
View details →
VTC-16-PW DC Magnetron Powder Coater with Vibrating Sample Cup
View details →
VTC-3HD-VP Three-Head RF/DC Powder Coater with Gas Purification
View details →