RF-300I-LD 13.56 MHz RF Generator with Automatic Impedance Matching
An air-cooled RF generator with automatic matching for laboratory sputtering setups, providing adjustable output up to 300 W.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Output power: 5–300 W
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RF frequency: 13.56 MHz
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Power stability: ±1%
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Output power | 5–300 W |
|---|---|
| RF frequency | 13.56 MHz |
| Power stability | ±1% |
| Frequency stability | ±0.005% |
| Matching | Automatic variable-capacitor matching |
| Dimensions | 400 × 450 × 80 mm |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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