VTC2RFC Rotary-Rocking RF Sputter Coater for Powders
A rotating and rocking quartz tube agitates powders during RF sputtering, with internal blades to assist material mixing.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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RF output: 5–300 W; 13.56 MHz
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Tube length: 700 mm
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Tube outer diameters: 180 mm center; 130 mm ends
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| RF output | 5–300 W; 13.56 MHz |
|---|---|
| Tube length | 700 mm |
| Tube outer diameters | 180 mm center; 130 mm ends |
| Rotation speed | 1–10 rpm |
| Rocking angle | ±4° |
| Cooling-water flow | 16 L/min |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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