HVMSS-SPC-1-LD Tilting 1-Inch RF/DC Magnetron Sputtering Source
A compact source component with adjustable incidence angle, suitable for integration with an external RF or DC supply and water cooling.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Target diameter: 25.4 mm
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Maximum target thickness: 3 mm
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Maximum input power: 250 W DC; 100 W RF
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Target diameter | 25.4 mm |
|---|---|
| Maximum target thickness | 3 mm |
| Maximum input power | 250 W DC; 100 W RF |
| Head tilt | ±45° |
| Operating voltage | 200–1000 V |
| Operating pressure | 1 mTorr–1 Torr |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm target materials, substrate dimensions, power sources, vacuum pumps, cooling and gas requirements with LabSova. Optional components and laboratory utilities must be specified separately.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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