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Thin Film Deposition Equipment

MSKPSEGEC1515 Six-Source Glovebox Thermal Evaporation System

ModelMSKPSEGEC1515

Three metal and three organic evaporation sources are integrated with a purified glovebox for air-sensitive thin-film research.

Source configuration 3 metal sources + 3 organic sources
Source temperature ratings Metal: ≤1500 °C; organic: 0–700 °C
Chamber dimensions 400 × 400 × 450 mm
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Equipment features

Key product features

  • Source configuration: 3 metal sources + 3 organic sources

  • Source temperature ratings: Metal: ≤1500 °C; organic: 0–700 °C

  • Chamber dimensions: 400 × 400 × 450 mm

Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Source configuration 3 metal sources + 3 organic sources
Source temperature ratings Metal: ≤1500 °C; organic: 0–700 °C
Chamber dimensions 400 × 400 × 450 mm
Maximum sample size 150 × 150 mm
Stage rotation 0–30 rpm
Purified atmosphere O2 <1 ppm; H2O <1 ppm

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Confirm the evaporation material, source compatibility, substrate dimensions, vacuum level and electrical configuration with LabSova. Equipment and accessories are supplied according to the agreed configuration.