VTC100PA-PTFEUS Heated PTFE Spin Coater with Ultrasonic Spray Delivery
Ultrasonic solution delivery combines with programmable spin coating and a heated PTFE chamber for solution-based film preparation.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Spin speed: 500–10000 rpm
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Heating limit: 200 °C for <10 min
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Chuck-supported wafers: 1–4 in
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Spin speed | 500–10000 rpm |
|---|---|
| Heating limit | 200 °C for <10 min |
| Chuck-supported wafers | 1–4 in |
| Program storage | 12 programs × 6 segments |
| Spray patterns | Approximately 20 mm and 40 mm diameter |
| Chamber diameter | 150 mm |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm substrate dimensions, solution properties, chuck compatibility, exhaust and electrical requirements with LabSova before selecting a coating configuration. Heating and dispensing options depend on the chosen model.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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