VTC-100PAX 12500 rpm High-Speed Spin Coater with Lid Interlock
A high-speed coating platform with a safety-interlocked lid and multi-segment recipes, using aluminum vacuum chucks for 20–100 mm substrates.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Spin speed: 500–12500 rpm
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Chuck-supported substrate range: 20–100 mm
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Program storage: 12 programs × 6 segments
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Spin speed | 500–12500 rpm |
|---|---|
| Chuck-supported substrate range | 20–100 mm |
| Program storage | 12 programs × 6 segments |
| Segment duration | 0–999 s |
| Acceleration | 100–2000 rpm/s |
| Chamber diameter | 150 mm |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm substrate dimensions, solution properties, chuck compatibility, exhaust and electrical requirements with LabSova before selecting a coating configuration. Heating and dispensing options depend on the chosen model.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.







