OTF-1200X-III-80-F3LV Three-Zone CVD Furnace with Gas Mixing
A long heated-tube system for CVD and diffusion research, using three independent zones and an 80 mm quartz tube with integrated three-gas mixing.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Operating temperature | 1100 °C continuous; 1200 °C maximum |
|---|---|
| Heating zones | 220 + 440 + 220 mm; 880 mm total |
| Quartz tube | 80 mm OD x 72 mm ID x 1400 mm L |
| Gas flow ranges | 3 channels: 10–100, 16–160, 25–250 cc/min |
| Vacuum pump | 120 L/min rotary vane pump; stated system vacuum 10^-2 Torr |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Product description
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
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