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Thin Film Deposition Equipment

VTC-EV3-GB Three-Crucible Glovebox Evaporator for 4-Inch Substrates

ModelVTC-EV3-GB

Three sequentially heated crucibles and a rotating 4-inch holder support multilayer evaporation while samples remain inside a purified glovebox.

Evaporation crucibles 3 × 3 mL
Temperature range 200–1700 °C; B-type thermocouples
Substrate holder 4 in diameter; 5 rpm
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Equipment features

Key product features

  • Evaporation crucibles: 3 × 3 mL

  • Temperature range: 200–1700 °C; B-type thermocouples

  • Substrate holder: 4 in diameter; 5 rpm

Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Evaporation crucibles 3 × 3 mL
Temperature range 200–1700 °C; B-type thermocouples
Substrate holder 4 in diameter; 5 rpm
Source-to-sample distance 40–90 mm
Chamber inner size Ø260 × 310 mm
Purified atmosphere O2 <1 ppm; H2O <1 ppm

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

The image is a system layout illustration, not a photograph of the delivered equipment.

Confirm the evaporation material, source compatibility, substrate dimensions, vacuum level and electrical configuration with LabSova. Equipment and accessories are supplied according to the agreed configuration.