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Chemical Vapor Deposition (CVD)

GSL-1700X-F3LV Alumina CVD Furnace with Three-Gas Mixing

ModelGSL-1700X-F3LV

A high-temperature alumina-tube system combines gas mixing, mechanical vacuum and corrosion-resistant pressure sensing for CVD, diffusion and atmosphere-controlled heat treatment.

Maximum temperature 1700 °C
Alumina tube 99.8%; 80 mm OD x 73 mm ID x 1000 mm L
Heating zone 455 mm; uniform zone 150 mm
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Maximum temperature 1700 °C
Alumina tube 99.8%; 80 mm OD x 73 mm ID x 1000 mm L
Heating zone 455 mm; uniform zone 150 mm
Gas flow ranges 3 channels: 10–100, 16–160, 25–250 cc/min
System vacuum 5 x 10^-2 Torr with mechanical pump

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.