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Chemical Vapor Deposition (CVD)

OTF-1200X-III-5-C3LVSF Sliding-Flange Three-Zone CVD Furnace

ModelOTF-1200X-III-5-C3LVSF

A 130 mm quartz-tube CVD system with three independent heating zones, gas mixing and a guided flange that simplifies sample loading.

Operating temperature 1100 °C continuous; 1200 °C maximum
Quartz tube 130 mm OD x 120 mm ID x 1400 mm L
Uniform-temperature length 625 mm at equal zone settings; ±1 °C
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Operating temperature 1100 °C continuous; 1200 °C maximum
Quartz tube 130 mm OD x 120 mm ID x 1400 mm L
Uniform-temperature length 625 mm at equal zone settings; ±1 °C
Loading rail 800 mm
Gas mixing 3 channels

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.