ALD-1200X-R-4 Rotary Tube ALD Furnace
A rotating quartz-tube ALD furnace for powder coating research, pairing pulsed precursor delivery with four-channel mass-flow control and programmable heating.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Continuous temperature | 1100 °C |
|---|---|
| Tube size and rotation | 4 in quartz tube; 0–10 rpm |
| ALD dosing valves | 2 valves; 10 ms minimum pulse |
| Gas flow control | 4 MFC channels; 6 in touchscreen |
| Furnace power | 208–240 V AC, single phase; 4 kW max |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Product description
Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.
