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実験室用研削・研磨装置

UNIPOL-1502 15-Inch Precision Wafer Polisher for Three 4-Inch Samples

モデルUNIPOL-1502

UNIPOL-1502 provides three yokes around a 15-inch platen for batch wafer preparation. It supports three 4-inch specimens or a single larger wafer with the appropriate holder configuration, with speed control up to 125 rpm.

Plate diameter 15 inches
Sample configurations 3 x 4-inch wafers, or 1 x 6-inch / 8-inch wafer
Plate speed 0–125 rpm
  • 最終構成は見積前に確認
  • 用途に応じてカスタムと付属品を確認
  • 輸出梱包と書類は必要に応じて対応
代表的な用途
  • Multi-wafer laboratory polishing
  • Lapping of larger wafers with a single-station setup
設備の特徴

主な製品特徴

  • Three yokes for configurable specimen handling

  • Cast-iron and aluminum working plates

  • Timed stop for polishing runs

技術データ

技術仕様

仕様はシステム別に整理され、設備タイプごとに重要なパラメータを表示します。

Key specifications

Plate diameter 15 inches
Sample configurations 3 x 4-inch wafers, or 1 x 6-inch / 8-inch wafer
Plate speed 0–125 rpm
Timer 0–99 hours
Power 400 W
Power supply 208–240 V AC, 50/60 Hz
Machine dimensions 720 x 580 x 380 mm

仕様は構成やカスタム内容により変更される場合があります。最終データは確認済み見積に従います。

An 8-inch wafer uses a different workstation arrangement from three 4-inch wafers. Surface requirements and holder selection should be agreed before ordering.

Images may show optional accessories. Confirm voltage, holders, consumables and included items in the final quotation.