VTC200PV Vacuum and Inert-Atmosphere Programmable Spin Coater
Separate pumping for the chamber and chuck enables controlled-atmosphere coating; mechanical holding is required during vacuum injection.
- Final configuration confirmed before quotation
- Customization and accessories reviewed by application
- Export packing and documentation available on request
Key product features
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Spin speed: 500–10000 rpm
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Program stages: 6
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Maximum segment duration: 999 s
Technical specifications
Specifications are organized by system so different equipment types can present the parameters that matter for their application.
Key specifications
| Spin speed | 500–10000 rpm |
|---|---|
| Program stages | 6 |
| Maximum segment duration | 999 s |
| Maximum substrate diameter | 6 in |
| Specified chamber pressure limit | 110 Torr |
| Vacuum-mode holding | Mechanical fixture; vacuum chuck for inert-gas mode |
Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.
Confirm substrate dimensions, solution properties, chuck compatibility, exhaust and electrical requirements with LabSova before selecting a coating configuration. Heating and dispensing options depend on the chosen model.
For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.







