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Chemical Vapor Deposition (CVD)

OTF-1200X-III-HVC-LD Three-Zone High-Vacuum CVD Workstation

ModelOTF-1200X-III-HVC-LD

A three-zone tube furnace combined with four-channel mass-flow delivery and a high-vacuum station for research requiring both temperature gradients and controlled gas composition.

Operating temperature 1100 °C continuous; 1200 °C maximum
Heating zones 3 x 300 mm; 900 mm total
Gas control 4 MFC channels with digital display
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Operating temperature 1100 °C continuous; 1200 °C maximum
Heating zones 3 x 300 mm; 900 mm total
Gas control 4 MFC channels with digital display
System vacuum Down to 1 x 10^-4 Torr with specified seals
Furnace power 208–240 V AC, single phase; 7 kW

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.