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Chemical Vapor Deposition (CVD)

MSKUSP17SP Ultrasonic Precursor Generator for Mist CVD

ModelMSKUSP17SP

An ultrasonic nebulizer with syringe feeding and mild heating for aerosol-assisted CVD. A removable stainless vessel simplifies cleaning between precursor formulations.

Ultrasonic frequency 1.7 MHz
Mist droplet size <10 µm, dependent on solution and gas conditions
Syringe capacity 10 µL–60 mL
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Ultrasonic frequency 1.7 MHz
Mist droplet size <10 µm, dependent on solution and gas conditions
Syringe capacity 10 µL–60 mL
Liquid feed range 3.9 µL/min–76.5 mL/min, syringe-dependent
Heating tape limit 80 °C

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.