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PVD and Hybrid Deposition Furnaces

GSL-1100-Micro In-Situ CVD/PVD Observation Furnace

ModelGSL-1100-Micro

A compact dual-heater furnace with an optical observation window for examining deposition and thermal changes in a small quartz processing tube.

Maximum temperature 1100 °C
Quartz tube 30 mm OD x 24 mm ID x 370 mm L
Observation window 12 mm, UV-grade
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Maximum temperature 1100 °C
Quartz tube 30 mm OD x 24 mm ID x 370 mm L
Observation window 12 mm, UV-grade
Heating plates 2 x 17 x 25 mm
Temperature control 2 controllers; 30 segments each; ±1 °C

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.

Procurement details can be confirmed before ordering.

For international buyers, quotation confirmation can include configuration, accessories, packing method, export documents, inspection photos or videos and shipping terms.

Confirm requirements
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