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Chemical Vapor Deposition (CVD)

GSL-1700X-60-III-F3LV Three-Zone Alumina CVD Furnace

ModelGSL-1700X-60-III-F3LV

A three-zone ceramic-tube furnace establishes high-temperature gradients for CVD and diffusion. The center zone reaches 1700 °C while the outer zones operate up to 1400 °C.

Zone temperatures Center 800–1700 °C; outer zones 800–1400 °C
Heating lengths 190 + 250 + 190 mm
Alumina tube 60 mm OD x 54 mm ID x 1200 mm L
  • Final configuration confirmed before quotation
  • Customization and accessories reviewed by application
  • Export packing and documentation available on request
Technical data

Technical specifications

Specifications are organized by system so different equipment types can present the parameters that matter for their application.

Key specifications

Zone temperatures Center 800–1700 °C; outer zones 800–1400 °C
Heating lengths 190 + 250 + 190 mm
Alumina tube 60 mm OD x 54 mm ID x 1200 mm L
Gas channels 3 channels: 10–100, 16–160, 25–250 cc/min
Power supply 208–240 V AC, single phase; 10 kW

Specifications may change with configuration and customization. Final data is subject to the confirmed quotation.

Product description

Confirm precursor or sample compatibility, tube and flange configuration, gases, pumping, cooling, exhaust and electrical supply with LabSova before ordering. Images may show optional accessories; the agreed configuration defines supply. Temperature ratings do not imply that every vacuum or pressure condition is permitted at that temperature.